Reduction of radiation thermometry bias errors in a CVD reactor

化学气相沉积反应器中辐射测量偏离误差的缩减

Abstract

用以减少在例如CVD反应器之类的容器中的辐射测温偏离误差的设备。在一实施例中,辐射测温计利用焦外远心透镜装置。焦外远心透镜装置聚焦于无限远处,但却被用于捕获来自于焦点外之相对接近之目标物(例如在数米内)之辐射。捕获来自目标物之准直的辐射减少了杂散辐射之贡献。在另一实施例中,源自于周围加热组件之指定部分之散射辐射,可藉由若干机制中的一个而局部地减少,包含减少指定部分之发射(例如操作温度)、或者捕获源自于该指定部分之辐射之一部分或使其偏斜。固定于接近由晶圆载具之中心延伸之轴线并横跨该指定部分的辐射测温计承受较少的杂散辐射,藉此可提供更可靠之温度读数。
Apparatuses for reducing radiation thermometry bias errors in enclosures such as CVD reactors. In one embodiment, a radiation thermometer utilizes an off-focus telecentric lens arrangement. The off-focus telecentric arrangement is focused at infinity, but is utilized to capture radiation from a relatively proximate target (e.g., within a couple meters) that is out of focus. The capture of collimated radiation from the target diminishes the contribution of stray radiation. In another embodiment, scattered radiation originating from a designated segment of a peripheral heating element can be reduced locally by one of several mechanisms, including reducing the emission (e.g., operating temperature) of the designated segment, or capturing or deflecting a portion of the radiation originating from the designated segment. Radiation thermometers fixed proximate an axis that extends from the center of the wafer carrier and across the designated segment are subject to less stray radiation, thus providing a more reliable temperature reading.

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