Self-reference scattering measurement device and method

一种自参考散射测量装置及方法

Abstract

本发明提出一种自参考散射测量装置,其特征在于包括:辐射光源;分束镜,将照明光分为第一照明光束和第二照明光束;物镜,将所述第一照明光束汇聚到基底表面,并收集基底表面反射/衍射的光;二维阵列探测器,位于物镜光瞳位置的共轭面,用于测量所述基底表面反射/衍射光的角分辨谱光斑;成像系统,将所述物镜的光瞳成像到所述探测器;以及反射系统,至少包括两个倾斜反射面,其等效反射面位于物镜光瞳的共轭面,用于使所述第二照明光的光轴发生偏转,并将所述第二照明光反射后经所述成像系统成像到所述二维阵列探测器上,所述二维阵列探测器同时测得所述第二照明光束形成的监测光斑和所述基底表面反射/衍射的第一照明光束在所述物镜光瞳形成的角分辨谱光斑。
The invention provides a self-reference scattering measurement device. The self-reference scattering measurement device is characterized by comprising a radiation light source, a beam splitter, an objective lens, a two-dimensional array detector, an imaging system and a reflection system, wherein the beam splitter is used for dividing illumination light into a first illumination light beam and a second illumination light beam; the objective lens is used for collecting the first illumination light beam to the surface of a substrate and collecting light reflected/diffracted by the surface of the substrate; the two-dimensional array detector is located on a conjugate surface of a pupil position of the objective lens and is used for measuring an angle resolution spectrum light spot of the light reflected/diffracted by the surface of the substrate; the imaging system is used for imaging a pupil of the objective lens to the detector; the reflection system at least comprises two inclined reflection surfaces; the equivalent reflection surfaces are located on the conjugate surface of the pupil of the objective lens and are used for deflecting an optical axis of the second illumination light, reflecting the second illumination light and imaging the second illumination light on the two-dimensional array detector by the imaging system; and the two-dimensional array detector is used for measuring a monitoring light spot formed by the second illumination light beam and the angle resolution spectrum light spot formed on the pupil of the objective lens by the first illumination light beam reflected/diffracted by the surface of the substrate.

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